含氧化銦錫廢棄物之處理與回收再利用研究

Abstract

本論文研製之目的在於光電業TFT-LCD廠如友達、群創、華映、彩晶及觸控Touch Panel廠如達鴻、勝華、悅城、安可於生產運作過程中，由於氧化錫銦濺鍍ITO(Indium Tin Oxide)Sputtering設備中之元件表面會附著相對程度之金屬及金屬氧化物鍍層，故必須定期委託設備資材維護廠商施行設備元件之表面清洗再生工作，而資材維護廠商於進行設備元件之清洗再生作業前，均預先將設備元件上附著之金屬及金屬氧化物鍍層清除；而在廢棄物之清除方式主要有六大種，分別為：事業自行清除、再利用機構自行清除、事業委託合法運輸業清除、再利用機構委託合法運輸業清除、事業委託領有廢棄物清除許可證之公民營清除機構清除、再利用機構委託領有廢棄物清除許可證之公民營清除機構清除。 傳統方式為泡酸液處理，簡稱其為"液態"含銦錫廢棄物，但其衍生因酸化反應時一併腐蝕鋁製或不銹鋼元件本體，造成工件壽命縮短運轉成本過高問題，且其因腐蝕本體所額外產生的鋁、鐵、鉻、鎳等重金屬，亦造成後段處理成本過高及廢棄物處理問題；故開發以較不傷本體，但亦能有效清除鍍層的物理方式，進行敲擊(高壓水刀)及噴砂使表面金屬或金屬氧化物掉落；因此將產生之廢棄物來源為：氧化錫銦濺鍍設備元件定期維護之表面清洗再生作業前，經敲擊及噴砂產出「含高濃度銦錫廢料」及酸液經由廢水處理後所產出污泥也富含銦錫化合物，簡稱"固態"含銦錫廢棄物。 此方法所產生的含銦錫廢棄物，皆能透過已開發之技術處理回收再生使用，且其終端廢棄物污泥，因源頭處理方式的改善，可避免含銦錫之廢料在TCLP管制的銅、鉻、鎘、鉛、鋇、汞、砷、硒、六價鉻，將其處理標準自「 有害事業廢棄物」，提升為「 一般事業廢棄物」，能為企業降低成本增加競爭力，也為環保善盡企業責任。

The purpose of this paper is to study the recycle of component of sputtering equipment surface coating by ITO in photovoltaic industry manufacturer such as TFT-LCD plant AUO, Innolux, CPT, Hannstar and touch Panel manufacturer such as Cando, Wintek, Onana and Aimcore during production process. Because of ITO (Indium Tin Oxide) related metal and metal oxide coating, it must be regularly asks equipment materials maintenance vendors implemented surfaces of equipment components washing of regeneration work. However, before the cleaning of regeneration operations, attached metal and metal oxide coating on the equipment components must be removed and clear; while in waste clearing the way there are six major types, namely: enterprise has cleared and re-use self-clearing agency, undertakings entrusted clear legal transportation, reuse agency entrusted legal transport Clear, utilities commission licensed waste clearance permits public and private institutions clear, reuse agency entrusted licensed waste clearance permits public and private institutions clear. Traditional way is to soak by acid treatment, referred to it as "liquid" with indium tin waste, but its derivative acidification and corrodes surface of aluminum or stainless steel body components, resulting in shortening the life of the work piece is costly problem, and its due aluminum, iron, chromium, nickel and other heavy metals that generate additional corrosion of the body, the section also causes the high cost of processing and disposal problems; less injury to the body development, but also effectively remove physically coating, for percussion (high-pressure water jet) and sandblasting the surface of metal or metal oxide falling; waste sources will therefore be incurred as follows: indium tin oxide sputtering regular maintenance of equipment components renewable surface cleaning operations before blasting through percussion and outputs " wastes containing high concentrations of indium tin "and the acid output via the wastewater treatment sludge is also rich in indium-tin compounds, referred to as" solid "with indium tin waste. This method produces indium-tin-containing waste, able to handle recycling technology has been developed through the use of, and the terminal waste sludge treatment due to improvement in the source, you can avoid waste containing indium tin copper in the TCLP control , chromium, cadmium, lead, barium, mercury, arsenic, selenium, hexavalent chromium, its treatment standards since the "hazardous waste", promoted to "general industrial waste", to increase the competitiveness of enterprises to reduce costs, but also To fulfill its corporate environmental responsibility.