無塵室環境氣體偵測器佈點模式合理性探討-以某TFT LCD廠房為例

Abstract

本論文研製之無塵室環境氣體偵測器佈點設置合理性為探討液晶面板（TFT-LCD）產業，從第3.5代至第7.5代一直都在尋求更大尺寸產品的發展及應用，產品尺寸越大、及應用範圍越廣，相對地無塵室中所使用之氣體/化學品使用量越大種類也更為繁多，為了使各種製程危害氣體於第一時間洩漏時之處理及因應產能之擴充及製程需求所導入新機台Layout是否會改變無塵室流體之狀況及如何能減少氣體偵測器反應的時間，使氣體偵測器能夠立即給予系統及人員在應變及處理上正確且快速的回饋能力。 此研究乃以運轉之TFT-LCD廠為例，將無塵室氣體流場流動情形之調查及廠內無塵室內機台設備、供應系統閥箱及氣體偵測器分佈情形及製程危害氣體種類之物理性、供應設備之資訊整合及分析，重新審視無塵室內偵測器設置現況，提供其佈點最佳化之建議及新導入機台偵測器設置之參考。

In the process of manufacturing, the alteration of manufacturing process might lead to changes of airflow in cleanrooms. Therefore, it is crucial to re-estimate the rationality of the positioning of cleanroom hazardous production material gas detectors. From 3.5 inch to 7.5 inches thin film transistor liquid crystal display (TFT LCD), the researchers have been seeking for more new applications and new product developments. The larger the size of the FTF LCD, the more the possible application could be applied on. However, with the growth of the numbers of applications, the types of chemicals being used in the cleanroom might increase. To provide a sound instruction in handling emergency responses, such as hazardous gas leakage, the impacts of the layout of newly introduced machine on cleanroom airflow are investigated to improve the accuracy and efficiency of the information shown by gas detectors, and to further enhanced the decision being made by operators. In the case of TFT-LCD factory, the airflow and equipment in the cleanroom were investigated; distribution of manufacturing equipment, gas valve manifold boxes and gas detectors were analyzed; physical properties of hazardous gases and information of supplying equipment were integrated and introduced as parameters into the gas diffusion simulation program for further analysis. The results of the simulation then were analyzed in comparison with the reality. Based on that, an enhanced solution in regards of engineering integrating and planning, gas detector distribution and installation was proposed. This research provides a suggestion and reference on optimization of gas detector distribution and installation.