磷酸回收系統效益分析-以某半導體晶圓廠為例

Abstract

半導體電子產業屬於高耗能產業，生產過程中需耗費大量的水、電、空調、化學品及氣體等能源及原物料，而其中使用化學品會排放具酸鹼性及有機性的龐大廢液。 目前政府相關單位已針對半導體電子產業制訂嚴格放流水標準，環保團體亦對園區內所產生的汙染物相當重視且扮演監督角色，因此如何將廢液妥善處理，是園區內每個產業的重要課題之一。 本研究主要以某半導體廠化學品磷酸廢液回收系統，利用磷酸廢液回收流程：設備排放→回收管路→回收桶槽→委外廠商處理。使其磷酸廢液提供廠商進行有效再利用，並減少廢水廠處理成本及廢液排放，達到環保及產業雙贏。

Semiconductor industry is high energy-consumption industry. The production process use a lot water, power, air condition, chemicals and gases and relative raw materials, which chemical in production process will emit a huge of acid, caustic, and solvent waste chemical. Currently the Government relative agencies had developed strict emission standards for semiconductor industry. Environmental protection group also monitor pollutant of semiconductor production process. How to improve and handle the process emission is a very important issue for semiconductor industry. This study topic is explain a semiconductor FAB waste phosphate chemical collection system introduction and profit analysis. The phosphate waste collection system flow as below: Production Tool Drain → Phosphate Drain Piping → Phosphate Collection Tank → Sell Outsourcing Treatment. The method could provide to reuse downgrade phosphate or production relation product, and reduction the semiconductor FAB waste water treatment cost and emission.