矽基片B型抗諧振反射光波導環形共振陷頻濾波器之設計,製作和特性量測

Abstract

本論文研究B型抗諧振反射光波導(ARROW-B)環形共振陷頻濾波器元件，利用滑輪型的環型共振增加耦合長度達到較高的品質因子。由於B型抗諧振反射光波導擁有較大的導光區，所以能夠有效和單模光纖相匹配。在此濾波器元件的設計中，我們使用數值模擬和分析光場在元件中的傳播特性，使其在空氣環境下可在C band濾出高品質因子的波。我們先利用轉移矩陣法與等效折射係數法分析與設計B型抗諧振反射光波導結構。然後，利用二維有限時域差分法模擬B型抗諧振反射光波導環形共振陷頻濾波器的傳播特性。我們共設計了兩種環形半徑分別為11.1和12.1μm之環型共振元件，模擬得到之品質因子和FSR分別為43797、55669和15.3、13.5 nm，另外設計的結構是利用滑輪型環型共振製作帶通濾波器,模擬得到之品質因子和FSR為45670和14.1 nm。製作出的B型抗諧振反射光波導環形共振濾波器元件在間隙是0.8μm情況下，所量測到的品質因子和FSR分別為23960、44580和21.61、24.91 nm。

In this study, ring resonator notch filters with B-type antiresonant reflecting optical waveguide of (ARROW-B) structures have been investigated. The ARROW-B pulley-type ring resonator notch filter increased the coupling length to provide relatively high quality factor characteristics in C band. ARROW-B waveguides with a thick guiding region can provide efficient coupling with a single-mode fiber. The characteristics of ARROW-B structure were analyzed with the transfer matrix method and the effective index method in the C band. We used the 2D-FDTD (finite-difference time-domain) method to simulate the propagation characteristics of the ARROW-B ring resonator notch filter. We chose the radius of the ring resonator as 11.1 and 12.1 μm respectivly. The quality factors found from the simulations were about 43797 and 55669, and the free spectral ranges were 15.3 and 13.5 nm. We also designed and simulated a pulley structure add-drop filter. The corresponding quality factor and FSR were about 45670 and 14.1 nm. The ARROW-B pulley-type ring resonator notch filter were fabricated and characterized. The quality factor and FSR of the fabricated ARROW-B ring resonator notch filters were obtained as 23630, 44580 and 21.16, 24.91 nm.