以石墨烯為震膜之低功耗微型喇叭製程設計與開發

Abstract

摘 要

本文涵蓋設計，製造和開發中常用的助聽器，應用微機電系統（MEMS）電磁驅動的微型音箱。這裡所提出的設計是電磁驅動基礎微機電系統微型揚聲器使用400微米寬尼費軟磁，單迴路200微米寬的銅線圈，硬磁鐵和石墨烯膜。乙基纖維素（EC） 穩定石墨烯油墨用於在此過程中，以石墨烯為塗佈層在基板上，塗佈的石墨烯層的厚度測定，從148nm到800nm，使用SEM（掃描電子顯微鏡）的技術和拉曼光譜和所觀察到的G譜帶特徵的是在1583 cm-1和D-波段是在1350 cm-1。殘餘應力在複合薄膜（石墨/鈦/銅）觀察，克服這個問題，並改進製造過程，薄膜應力的分析研究已經完成。

Abstract This thesis covers design, fabrication and development process of electromagnetic-actuated microspeaker commonly used in Hearing aids, with application of micro-electro-mechanical system (MEMS). The proposed designed electromagnetic-actuated MEMS-based micro-speaker is with 400 µm wide Nife soft magnet, single loop 200 µm wide Cu coil, hard magnet and graphene membrane. Ethyl cellulose (EC) stabilized graphen ink is used in this process to coat layers of graphene on substrate , the thickness of coated graphene layers are measured from 148nm to 800nm, by using SEM (Scanning Electron microscope) technique and characterized by the Raman spectroscopy and observed the G-band is at 1583 cm-1 and D-band is at 1350 cm-1 . Poor metal adhesion on the graphene layer which could be result from residual stress is observed in the composite thin film (Garphene /Ti/Cu). To overcome this issue and improving fabrication process, analytical study of thin film stress is done.