標題: Two-wavelength full-field heterodyne interferometric profilometry
作者: Hsieh, Hung-Chih
Chen, Yen-Liang
Jian, Zhi-Chen
Wu, Wang-Tsung
Su, Der-Chin
光電工程學系
Department of Photonics
關鍵字: two-wavelength interferometry;heterodyne interferometry;full-field measurement;profilometry;sine wave fitting algorithm
公開日期: 1-二月-2009
摘要: An alternative full-field interferometric profilometry is proposed by combining two-wavelength interferometry and heterodyne interferometry. A collimated heterodyne light is introduced into a modified Twyman-Green interferometer, the full-field interference signals are taken by a fast CMOS camera. The sampled intensities recorded by each pixel are fitted to derive a sinusoidal signal with the least-square sine wave fitting algorithm, and its phase can be obtained. Comparing the phase of the reference point, the relative phase of the pixel can be calculated. Next, the same measurement is made again at a different wavelength. The relative phase with respect to the effective wavelength can be calculated and the profile of the tested sample can be derived with the two-wavelength interferometric technique. Its validity is demonstrated. It has merits of both two-wavelength interferometry and heterodyne interferometry.
URI: http://dx.doi.org/10.1088/0957-0233/20/2/025307
http://hdl.handle.net/11536/7692
ISSN: 0957-0233
DOI: 10.1088/0957-0233/20/2/025307
期刊: MEASUREMENT SCIENCE & TECHNOLOGY
Volume: 20
Issue: 2
結束頁: 
顯示於類別:期刊論文


文件中的檔案:

  1. 000262582500024.pdf

若為 zip 檔案,請下載檔案解壓縮後,用瀏覽器開啟資料夾中的 index.html 瀏覽全文。