高科技廠無塵室機台防爆電氣設置評估之研究

Abstract

化學工廠、石油煉製廠、醫藥品製造廠、橡膠及合成樹脂製造廠、可燃性氣體製造廠、液化氣體填充廠所及園區之半導體及光電相關電子產業…等，均需使用或製造大量易燃性物質，屬爆炸性混合氣體可能生成之主要場所，該類場所使用之電氣設備如不具防爆構造性能，極易造成火災爆炸事故而蒙受重大損失。 TFT-LCD(Thin Film Transistor-Liquid Crystal Display)產業建廠成本是相當高昂的，亦是我國繼半導體產業以來，跨入21世紀後最主要的高科技工業。隨著生產設備步入大型化、自動化後，建廠成本更已逐漸超越半導體廠。 行政院勞工安全衛生委員會於「勞工安全衛生設施規則」[1]第一百七十七條規定：雇主對於作業場所有易燃液體之蒸氣、可燃性氣體或爆燃性粉塵以外之可燃性粉塵滯留，而有爆炸、火災之虞者，所使用的電氣機械裝置、設備，應具有適合其設置場所危險區域劃分使用之防爆性能構造。但觀察國內高科技廠之防爆電氣設置規劃大多注重於廠務區之設備，對於FAB內之製程機台較無整體性之評估。本文章之內容即針對無塵室機台防爆電氣如何設置評估進行探討，並納入防爆電氣正確的選用原則，在確認機台需要裝設防爆電氣的同時，能夠正確並快速的選用安全且合適的防爆電氣設備，盼能對於日後產業界有所幫助，並提供專班學員一份參考的文件。

關鍵詞：危險區域、電氣、防爆

Chemical Factory, Petroleum Refinery Industry, Medical Drugs Factory, Rubber and Synthetic Resin Factory, Ignitable Gas manufacturing plant, Liquefying Gas Packing Factory and the Campus Semiconductor and Photo electricity relating electronic industry…and so on, must use or produce massive flammable materials, which enable the creation of Explosive Mixture Gas. As a result, if installation of explosion-proof equipments was not adopted in this sort of manufacturing plants, the fire and explosion accidents would be happened easily and suffer damage and loss significantly such as facilities, equipments, people and cost. TFT-LCD (Thin Film Transistor-Liquid Crystal Display) manufacturing industry has invested heavily in building new factory, also in Taiwan becomes the primary technical industry following by the semiconductor industry in twenty-first century. With the large-scale and automation of production equipments, the setting cost had exceeded semiconductor factor gradually. According to the “Enforcement RULES of LABOR SAFETY AND HEALTH FACILITY LAW ARTICLE 177”, it is responsibility of the employer to provide explosion –proof constructions for electronic setting and facility, which must be appropriate to the partition of damage areas, with the vapor of inflammable liquid、 combustible gas or combustible dust except for the detention of deflagration dust, but have potential explosion and fire consideration. However, with the observation of the explosion-proof equipment setting in domestic high technical plants, most of them are more emphasize on the safety of facility area, but less on entire assessment of the manufacture machinery. The purpose of this article is to address how to assess the explosion-proof equipments setting and integrates the principles regarding the chose of explosion-proof equipments. Meanwhile, it shows accuracy and the fastest way to select safe and appropriate explosion-proof electrical facility while establishing machinery, to provide information, which might useful in the TFT-LCD manufacturing field, and provide the documents for learners in the future.

Key words：Hazardous area、electrical apparatus、explosion protection