非球面鏡量測系統

Abstract

本論文旨在開發一套可以自動化量測三維形貌的整合量測系統，可應用在光電元件外形或電容薄膜形變等。這套系統利用新式的光學干涉方法，以雷射光束射入晶體產生雙折射，其干涉的圖形成像至CCD 感測器後，經訊號處理單元藉此可以推算出其高度、位置、形狀等幾何參數，並傳至PC 來完成整個系統架構，再結合運動控卡及馬達驅動 器和滾珠螺桿機械結合來完成三軸定位機構裝置。執行上使用C++或VB 開發人機介面配合探頭完成一套自動化量測系統。另以不同尺寸大小、高寬比、和表面粗糙度之非球面鏡片來提供量測分析，提出客觀量測且有效而快速之檢測方法，是本論文探討與研究的重點。

The thesis is to develop an automatic integrated measurement system to evaluate geometric data in electro-optical devices or thin-film capacitor etc. This system which is based on interferometer method consists of a He-Ne laser, a uniaxial crystal, a CCD sensor, and a DSP module unit. A two axis XY table with the ball screw mechanism is equipped with the motion card, motion driver and PC. The probe is directed onto the specimen. Resulting circular interference fringe patterns which is recorded as Fresnel Zone Plates will be converted. Having scanned the surface of the specimen, we earn a 3D surface model. We adopt aspheric lens in different size, figure, aspect ratio, and roughness to analyze and evaluate geometric data. The result is shown in this thesis an objective and scientific methodology to industrial application