標題: | Illumination-Assisted Negative Bias Temperature Instability Degradation in Low Temperature Polycrystalline Silicon Thin-Film Transistors |
作者: | Lin, Chia-Sheng Chen, Ying-Chung Chang, Ting-Chang Hsu, Wei-Che Chen, Shih-Ching Li, Hung-Wei Tu, Kuan-Jen Jian, Fu-Yen Chen, Te-Chih 光電工程學系 Department of Photonics |
關鍵字: | elemental semiconductors;grain boundaries;insulated gate field effect transistors;interface states;semiconductor device reliability;silicon;thin film transistors |
公開日期: | 2009 |
摘要: | In this work, the negative bias temperature instability (NBTI) in low temperature polycrystalline silicon thin-film transistors in a darkened and in an illuminated environment was investigated. Experimental results reveal that the generation of interface state density (N(it)) showed no change between the different NBTI stresses. Nevertheless, the degradation of the grain boundary trap (N(trap)) under illumination was more significant than that in the darkened environment. This phenomenon is mainly caused by the extra number of holes generated during the illuminated NBTI stress. |
URI: | http://hdl.handle.net/11536/7906 http://dx.doi.org/10.1149/1.3115400 |
ISSN: | 1099-0062 |
DOI: | 10.1149/1.3115400 |
期刊: | ELECTROCHEMICAL AND SOLID STATE LETTERS |
Volume: | 12 |
Issue: | 6 |
起始頁: | H229 |
結束頁: | H232 |
Appears in Collections: | Articles |