電腦整合製造系統在半導體設備管理的發展與應用

Abstract

電子產業於二十世紀末期已經成為世界上最大的工業體，其中最重要的部份就是積體電路製造。過去降低成本的需求促使晶片尺寸持續微縮、晶圓尺寸增大與良率改善，其中統計製程品管方式則是控制晶圓良率的方法；如今晶片的微縮技術已邁入奈米的世代，積體電路製造效率的提昇成為降低製造成本的最佳途徑。資訊技術的運用於改善積體電路製造效率上扮演了關鍵的角色，例如先進製程/設備控制技術、即時監控技術等均需要資訊技術的介入，半導體標準通訊介面的制定則讓訊息取得有共同的平台，但是具有收集數據的能力是容易的，要知道如何處理它們才是挑戰。本論文是對過去電腦整合製造於半導體製造領域的發展做整體性的描述，以及就半導體設備管理的領域，探討如何於電腦整合製造的架構下設計其功能模組，以達提升設備管理效率的目的。

By the end of the last century, the electronics industry had become the largest industry in the world. The most important sector of this industry is the manufacturing of integrated circuits. In the past, the demands of reducing cost have decreased the size of chips, increased the wafer diameters and have improved yield. The Statistical Process Control method was applied to improve yield. As chip shrinkage technology moves into the era of nano-science, chip makers are considering various opportunities to reduce cost through manufacturing efficiency improvement. The application of information technology plays a key role in improving the manufacturing efficiency of integrated circuits, for example, the implementation of APC/AEC and real-time monitors. The SEMI standards for equipment automation provide a standard protocol for collecting information. However, to know how to use information collected is a greater challenge than simply collecting it. In this paper we summarize the past development of CIM applications to IC manufacturing industry, and describe the framework of CIM function modules that support the management of manufacturing equipment.