利用銅整合製程製作仿酢醬草結構之感測振膜麥克風

Abstract

本文提出一個有仿酢醬草結構感測振膜的銅電鍍仿生式麥克風，這個振膜設計採用中文學名為奧米亞棕蝇的聽覺感測機制 [5,6] 但是藉由感測振膜的去耦而有更好的靈敏度。在麥克風的設計上，總共有六片感測葉片透過彎曲彈簧互相連結並且接合於中央平衡支撐結構，此結構由各六個內外支樞連結到一個環上。在60dB聲音位準下，反相模式變形讓此結構有最大淨位移量0.02091μm，極化圖顯示此結構有25°±20%的空間分辨率。因為可以使用傳統電鍍製程製作麥克風，所以低製作成本和小尺寸讓此結構在助聽器應用上變得極好。

This paper presents a Cu electroplated biomimetic microphone with oxalis-like sensing diaphragms. This diaphragm design follows the acoustic sensing mechanism of parasitoid fly (Orima Ochracea) [5,6] but has larger sensitivity by decoupling the sensing diaphragm. In the microphone design, there are total six sensing leaves connected each other by serpentine springs and supported by a central gimbal structure which has six inner and six outer pivots connected to a circle ring. Under 60dB SPL, the device can have maximum 0.02091□m net displacement in a reversed-mode deformation. The polar pattern shows the device has 25°±20% opening angles. Because the microphone can be fabricated using conventional electroplating process, low manufacturing cost and small form factor will make the device fascinating for hearing aid applications.