以液相沈積法從事二氧化錫薄膜沈積之氣體感測器研究

Abstract

有別於一般較為廣泛使用的成長薄膜方式與機制，本論文利用液相沈積法以沈積含氟之二氧化錫薄膜，並以該薄膜作為硫化氫氣體感測器之主要感測材料。液相沈積法之優點不僅所需之設備簡單、無須在昂貴的真空環境下即可沈積，且可批次量產、大幅降低製程成本。論文中除了沈積二氧化錫薄膜外，亦於薄膜內摻雜二氧化矽，藉此以抑制二氧化錫晶粒成長、提升其靈敏度。除此之外，本實驗亦利用浸泡方式於感測層表面添加銅與金，以提升元件對硫化氫氣體之選擇性、靈敏度及抑制特性之飄移、提昇再現性。論文中並嘗試改變銅與金之濃度與比例以達到最佳化的量測效果，完成低功率、高靈敏度之硫化氫氣體感測器。

Different from usual mechanisms of growing membrane, this paper uses liquid phase deposition to deposit necessary thin film with fluorine to be a main sensing material of gas sensor. The reason of choosing liquid phase deposition is that it uses cheaper equipments, gets rid of vacuum environments, is ready for mass production, and reduces production cost. This paper introduces not only deposition of tin oxide thin film, but also doping silica oxide in the film to control the grain size of tin oxide, and improve the sensitivity of the sensor. Besides, the experiment uses soaking on sensing surface to add copper and gold to improve selectivity and sensitivity of the sensor on hydrogen sulfide, control the stability of results, and optimize results by change the concentration and the ratio of copper and gold to implement a low-power and high-sensitivity sensor on hydrogen sulfide.