二維微步進機構定位之研究

Abstract

壓電致動器具有低能量消耗、高精準度和反應時間短等優點，壓電致動器對於微步進機構是一種相當好的驅動器，微步進機構是利用壓電致動器對應驅動電壓反應快速的特性及黏滯與滑動的摩擦機制，建構出可以用於精密定位的衝量驅動機構。在此我們選用質量-阻尼-彈簧之衝量驅動機構來分析此機構的動力學。實驗則分為兩部分，首先利用DSP控制器與雷射干涉儀量測系統來進行實驗，以探討不同的壓電致動器對應相同的驅動波形使機構產生步進現象有何差異，並同時對壓電致動器與微步進機構進行系統鑑別。然後再進行二維微步進機構之平移與旋轉實驗，來探討不同的驅動電壓與機構移動的方式之間的關係，進一步使二維微步進機構的移動與期望的結果相符，以達到精密定位的目的。

Because of low power consumption, ultra-high resolution and rapid response, piezoelectric actuator is one better choice of actuator for micro-stepping mechanism. Micro-stepping mechanism is an impact drive mechanism constructed by using the rapid displacement response of piezoelectric actuator and stick-slip motion of friction mechanism. A mass-damper-spring model is constructed to investigate the dynamics of the mechanism. The experiments are divided into two sections. We will combine the DSP controller and the laser interferometer measuring system to the experiment. To discuss the influences of different piezoelectric actuators and to identify the system of micro-stepping mechanism will help us to begin the next experiment. Next experiment is about the shift and rotation of 2-dimension micro-steeping. To find out the relations between the different waveforms and the displacement of the mechanism is the way to make the result close to the simulation and to achieve the purpose of precise positioning.