完整後設資料紀錄
DC 欄位語言
dc.contributor.authorChiou, Jin-Chernen_US
dc.contributor.authorShieh, Li-Jungen_US
dc.contributor.authorLin, Yung-Jiunen_US
dc.date.accessioned2014-12-08T15:10:46Z-
dc.date.available2014-12-08T15:10:46Z-
dc.date.issued2008-10-21en_US
dc.identifier.issn0022-3727en_US
dc.identifier.urihttp://dx.doi.org/10.1088/0022-3727/41/20/205102en_US
dc.identifier.urihttp://hdl.handle.net/11536/8238-
dc.description.abstractThis paper presents a CMOS-MEMS prestress vertical comb-drive resonator with a piezoresistive sensor to detect its static and dynamic response. The proposed resonator consists of a set of comb fingers fabricated along with a composite beam. One end of the composite beam is clamped to the anchor, while the other is elevated by residual stress. Actuation occurs when the electrostatic force, induced by the fringe effect, pulls the composite beam downwards to the substrate. The initial tip height at the free end of the resonator due to residual stress is approximately 60 mu m. A piezoresistor is designed to sense the vertical deflection and vibration of the resonator. The relative change in the resistance of the piezoresistor (Delta R/R) is about 0.52% when a voltage of 100V is applied in static mode. The first resonant frequency of the device is 14.5 kHz, and the quality factor is around 36 in air. The device is fabricated through TSMC 0.35 mu m 2p4m CMOS process and post-CMOS process.en_US
dc.language.isoen_USen_US
dc.titleCMOS-MEMS prestress vertical cantilever resonator with electrostatic driving and piezoresistive sensingen_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0022-3727/41/20/205102en_US
dc.identifier.journalJOURNAL OF PHYSICS D-APPLIED PHYSICSen_US
dc.citation.volume41en_US
dc.citation.issue20en_US
dc.citation.epageen_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000260131700020-
dc.citation.woscount7-
顯示於類別:期刊論文


文件中的檔案:

  1. 000260131700020.pdf

若為 zip 檔案,請下載檔案解壓縮後,用瀏覽器開啟資料夾中的 index.html 瀏覽全文。