晶圓廠遷移施工程序及安全管理

Abstract

1. 二手機台設備市場興起 因應剩餘的半導體製造設備及相關服務，藉由地域大小而逐步擴展為全球性的發展。二手設備業者則表示，過去8吋廠二手設備比起原廠的全新設備價格約便宜3~4成，近年來也成為8吋廠突破生產瓶頸、擴充產能的主要設備來源，目前也佔二手設備市場的7~8成市場。因應二手設備機台市場的蓬勃發展，機台遷移日益頻繁，相對設備的拆除及人員的安全管更顯重要。 2. 晶圓廠遷移前機台保養維護 設備機台依據檢查表，檢查各項移機工作之準備與執行，備妥移交資料文件及記錄，利用移機機台基本資料作為重新裝機之參考。設備機台經保養測試後維持最佳之勘用狀態，並將以上相關資料隨機台移機轉交至接收單位。 3. 設備遷移前各項施工步驟及流程安排 包裝機台清單(packing list)；文件申請；復運出口單；包機、報關、倉儲、保險…。 4. 機台拆移過程安全管理 召開協議組織施工前會議；召集各施工廠商，明瞭整個機台拆遷必須進行的步驟，避免進而影響本專案進度或產生工安事件。明確訂定『拆/移機管路拆除作業流程』，以期使本專案能順利進行；晶圓廠無塵室為Class 1作業環境，移機及管路拆除過程無形中改變了無塵室的作業生產環境。無塵室的環境和產品品質有密切的關係，作業環境中的風速、溫度、濕度…等的改變都可能是造成產品品質不良之因素，而環境Particle的變化就更不容忽視了，它是產品良率提升的隱形殺手，因此必需兼顧移機進度、環境品質及安全衛生，才能使拆/移機工程得以更加順利進行。

1. The second hand equipment market emergesIn accordance to surplus semiconductor manufacture equipment and correlation service, The affiliation but gradually expands by the region size for the global development. Second Hand equipment industry indicated that, in the past 8 inch factories second hand equipment derivation factory brand-new equipment price approximately were cheaper than 30~40% to become, in recent years also became 8 inch factories breakthroughs production bottleneck, the expansion produced can the main equipment to originate, at present also occupies Second Hand equipment markets 70~80 %to become the market .In accordance to second hand equipment market vigorous development。The equipment migrates day by day frequently，The relative equipment dismantle and personnel's safety reveals importantly. 2. Before FAB migration of tool maintenance Equipment Inspects base on check list of tool migration, prepares the proper reassignment and the recording material of document, the moving machine basic document takes reference the again installing equipment. The equipment after the maintenance and testing keep on the best condition and above correlation data along with the moving machine transmission to gaining unit, the each moving machine work according to this check table document. 3. Before the equipment migration various projects construction steps flow arrangement Tool packing list; Document application; Res-ship exports the list; the chartered airplane, the declaration, stores in a storehouse, the insurance. 4. Tool migration of the process safety control Before convention of organization construction conference, convenes each project vendor, the bright entire all of tool migration of the step which must carry on. Avoids then affecting this special case progress or having the labor accident event. Explicitly subscribes decides 『Dismantle pipeline and moving machine process work flow』, to the time enables this special case smoothly to carry on。FAB dustless clean room is the Class 1 work environment，Moving machine and the pipeline dismantle process imperceptibly changed dustless room work production environment。 Dustless room environment and the product quality have close relationship, in the work environment wind speed, the temperature, the humidity... and so on the change all possibly creates the product quality not good factor, but the environment Particle change has been not allow to neglect, it is the product good rate promotion hiding murderer, therefore the essential proper attention to both moving machine progress, the environment quality and the safety and health, can cause to open/the moving machine project to be able smoothly to carry on.