Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

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DC Field	Value	Language
dc.contributor.author	Chiu, HT	en_US
dc.contributor.author	Chuang, SH	en_US
dc.contributor.author	Tsai, CE	en_US
dc.contributor.author	Lee, GH	en_US
dc.contributor.author	Peng, SM	en_US
dc.date.accessioned	2014-12-08T15:01:11Z	-
dc.date.available	2014-12-08T15:01:11Z	-
dc.date.issued	1998	en_US
dc.identifier.issn	0277-5387	en_US
dc.identifier.uri	http://hdl.handle.net/11536/85	-
dc.description.abstract	New single-source precursor to tantalum nitride thin films, ((BuN)-N-t)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The structure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallography. (C) 1998 Elsevier-Science Ltd. All rights reserved.	en_US
dc.language.iso	en_US	en_US
dc.subject	organoimide complexes	en_US
dc.subject	tantalum complexes	en_US
dc.subject	CVD precursors	en_US
dc.title	Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride	en_US
dc.type	Article	en_US
dc.identifier.journal	POLYHEDRON	en_US
dc.citation.volume	17	en_US
dc.citation.issue	13-14	en_US
dc.citation.spage	2187	en_US
dc.citation.epage	2190	en_US
dc.contributor.department	應用化學系	zh_TW
dc.contributor.department	Department of Applied Chemistry	en_US
dc.identifier.wosnumber	WOS:000074378200007	-
dc.citation.woscount	31	-
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