標題: Spiral Scanning Method for Atomic Force Microscopy
作者: Hung, Shao-Kang
機械工程學系
Department of Mechanical Engineering
關鍵字: Atomic Force Microscopy;Trajectory Planning;Spiral Scanning Method
公開日期: 1-七月-2010
摘要: A spiral scanning method is proposed for atomic force microscopy with thoroughgoing analysis and implementation. Comparing with the traditional line-by-line scanning method, the spiral scanning method demonstrates higher imaging speed, minor image distortion, and lower acceleration, which can damage the piezoelectric scanner. Employing the spiral scanning method to replace the line-by-line scanning method, the experiment shows that the time to complete an imaging cycle can be reduced from 800 s to 314 s without sacrificing the image resolution.
URI: http://dx.doi.org/10.1166/jnn.2010.2353
http://hdl.handle.net/11536/8678
ISSN: 1533-4880
DOI: 10.1166/jnn.2010.2353
期刊: JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume: 10
Issue: 7
起始頁: 4511
結束頁: 4516
顯示於類別:會議論文