標題: | Characterization and modeling of metal-film microbolometer |
作者: | Shie, JS Chen, YM Mang, OY Chou, BCS 交大名義發表 光電工程學系 National Chiao Tung University Department of Photonics |
公開日期: | 1-十二月-1996 |
摘要: | The characteristic thermal parameters of a platinum-film microbolometer are extracted from the data of two measuring methods, A simple and accurate equivalent circuit model, along with its thermal behavior, is proposed for the device. Applying the model to simulate some device circuits results in good agreement with the experimental data, Furthermore, an effective method of ambient temperature compensation, proposed previously by our laboratory, is demonstrated both experimentally and by simulation using the same model. The established electro-thermal model therefore serves as an useful tool for SPICE simulations in the design of microbolometers. |
URI: | http://dx.doi.org/10.1109/84.546409 http://hdl.handle.net/11536/881 |
ISSN: | 1057-7157 |
DOI: | 10.1109/84.546409 |
期刊: | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
Volume: | 5 |
Issue: | 4 |
起始頁: | 298 |
結束頁: | 306 |
顯示於類別: | 期刊論文 |