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dc.contributor.author張俊彥en_US
dc.contributor.authorCHANG CHUN-YENen_US
dc.date.accessioned2014-12-13T10:29:17Z-
dc.date.available2014-12-13T10:29:17Z-
dc.date.issued2000en_US
dc.identifier.govdocNSC89-2213-E009-131zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/89077-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=542203&docId=99611en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject超高真空化學氣相沈積法zh_TW
dc.subject薄膜電晶體zh_TW
dc.subject複晶矽zh_TW
dc.subjectUHVIVDen_US
dc.subjectThin film transistor (TFT)en_US
dc.subjectPolysiliconen_US
dc.title超高真空化學氣相沉積低溫新穎複晶矽薄膜電晶體之製作與可靠度的研究---總計畫(II)zh_TW
dc.titleStudy of UHVCVD Deposited Poly-Si TFTs with Low Temperature Gate Dielectric and Novel Structure (II)en_US
dc.typePlanen_US
dc.contributor.department交通大學電機與控制工程研究所zh_TW
顯示於類別:研究計畫