| Title: | 利用連續波雷射結晶法製作低溫複晶矽薄膜電晶體之製程開發及其在面板系統整合上之應用---子計畫一：以連續波雷射法製作高效能低溫腹晶矽薄膜電晶體之製程開發(III) Process Developement of High Performance Low Temperature Polycrystalline Silicon by Continuous-Wave Laser Crystallization(III) |
| Authors: | 鄭晃忠 CHENG HUANG-CHUNG 交通大學電子工程系 |
| Issue Date: | 2006 |
| Gov't Doc #: | NSC95-2221-E009-253 |
| URI: | http://hdl.handle.net/11536/89332 https://www.grb.gov.tw/search/planDetail?id=1309445&docId=241972 |
| Appears in Collections: | Research Plans |
