完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Wang, Wei-Lin | en_US |
dc.contributor.author | Peng, Chun-Yen | en_US |
dc.contributor.author | Ho, Yen-Teng | en_US |
dc.contributor.author | Chuang, Shu-Chang | en_US |
dc.contributor.author | Chang, Li | en_US |
dc.date.accessioned | 2014-12-08T15:11:41Z | - |
dc.date.available | 2014-12-08T15:11:41Z | - |
dc.date.issued | 2011-05-01 | en_US |
dc.identifier.issn | 0734-2101 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1116/1.3539046 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/8961 | - |
dc.description.abstract | The crystallographic orientations of m-plane ZnO on (112) LaAlO(3) (LAO) substrate are [(1) over bar2 (1) over bar0](ZnO)parallel to[11 (1) over bar](LAO) and [0001](ZnO)parallel to[(1) over bar 10](LAO). The defects in m-plane ZnO have been systematically investigated using cross section and plan-view transmission electron microscopy (TEM). High-resolution TEM observations in cross section show misfit dislocations and basal stacking faults (BSFs) at the ZnO/LAO interface. In the films, threading dislocations (TDs) with 1/3 < 11 (2) over bar0 > Burgers vectors are distributed on the basal plane, and BSFs have 1/6 < 20 (2) over bar3 > displacement vector. The densities of dislocations and BSFs are estimated to be 5.1 x 10(10) cm(-2) and 4.3 x 10(5) cm(-1), respectively. In addition to TDs and BSFs, plan-view TEM examination also reveals that stacking mismatch boundaries mainly lie along the m-planes and they connect with planar defect segments along the r-planes. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3539046] | en_US |
dc.language.iso | en_US | en_US |
dc.title | Defects in m-plane ZnO epitaxial films grown on (112) LaAlO(3) substrate | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1116/1.3539046 | en_US |
dc.identifier.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | en_US |
dc.citation.volume | 29 | en_US |
dc.citation.issue | 3 | en_US |
dc.citation.spage | en_US | |
dc.citation.epage | en_US | |
dc.contributor.department | 材料科學與工程學系 | zh_TW |
dc.contributor.department | Department of Materials Science and Engineering | en_US |
顯示於類別: | 期刊論文 |