標題: Improvement of electrical characteristics for novel process-compatible floating channel solid-phase crystallized poly-Si TFTs
作者: Chang, Chia-Wen
Chang, Che-Lun
Lee, Jam-Wem
Lei, Tan-Fu
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2007
摘要: High-performance polycrystalline-silicon thin-film transistors (poly-Si TFTs) with floating channel solid-phase crystallization are proposed for the first time. By adopting this novel crystallization scheme, a better crystalline poly-Si film can be obtained in the suspended channel film. Poly-Si TFTs with this novel floating channel structure have been successfully fabricated and the experimental results demonstrate a superior electrical performance and reliability.
URI: http://hdl.handle.net/11536/9124
ISBN: 978-957-28522-4-8
期刊: IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
起始頁: 138
結束頁: 140
Appears in Collections:Conferences Paper