光彈調制式橢圓偏光儀之單入射角校正及線上量測

Full metadata record

DC Field	Value	Language
dc.contributor.author	趙于飛	en_US
dc.date.accessioned	2014-12-13T10:32:39Z	-
dc.date.available	2014-12-13T10:32:39Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2215-E009-086	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/91664	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=575209&docId=107533	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	光彈調制式橢圓偏光儀之單入射角校正及線上量測	zh_TW
dc.title	Single Incident Angle Alignment Technique of PEM Ellipsometry and Its in situ Measurement	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學光電工程研究所	zh_TW
Appears in Collections:	Research Plans