| 標題: | 光彈調制式橢圓偏光儀之單入射角校正及線上量測 Single Incident Angle Alignment Technique of PEM Ellipsometry and Its in situ Measurement |
| 作者: | 趙于飛 國立交通大學光電工程研究所 |
| 公開日期: | 2000 |
| 官方說明文件#: | NSC89-2215-E009-086 |
| URI: | http://hdl.handle.net/11536/91664 https://www.grb.gov.tw/search/planDetail?id=575209&docId=107533 |
| Appears in Collections: | Research Plans |
- Photoelastic modulated imaging ellipsometry by stroboscopic illumination technique / Han, CY;Chao, YF
- In situ calibration technique for photoelastic modulator in ellipsometry / Wang, MW;Tsai, FH;Chao, YF
- 光彈調變式橢圓偏光儀---反射面之效正(I) / 趙于飛
- 多波長光彈調變式橢圓偏光術 / 王夢偉;Meng-Wei Wang;趙于飛;Yu-Faye Chao
- 低溫電漿蝕刻製程與電漿診斷技術之開發研究---子計畫三：蝕刻製程橢圓儀線上即時量測系統之研製(I) / 趙于飛
- The intensity ratio alignment technique in photoelastic modulation ellipsometry and polarimetry / Chao, YF
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