高度微縮金氧半場效電晶體機械應力效應之研究(I)

Title:	高度微縮金氧半場效電晶體機械應力效應之研究(I) The Impact of Mechanical Stress in Highly Scaled MOSFETs (I)
Authors:	陳明哲 CHEN MING-JER 國立交通大學電子工程研究所
Issue Date:	2003
Gov't Doc #:	NSC92-2215-E009-057
URI:	http://hdl.handle.net/11536/91856 https://www.grb.gov.tw/search/planDetail?id=873530&docId=167353
Appears in Collections:	Research Plans

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