嵌入式銅導線之無研磨粒子平坦化技術的先進製程控制

Full metadata record

DC Field	Value	Language
dc.contributor.author	林家瑞	en_US
dc.contributor.author	LIN CHIA-SHUI	en_US
dc.date.accessioned	2014-12-13T10:33:41Z	-
dc.date.available	2014-12-13T10:33:41Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-2213-E009-114	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92193	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=843533&docId=159803	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	嵌入式銅導線之無研磨粒子平坦化技術的先進製程控制	zh_TW
dc.title	Advanced Process Control of Abrasive Free Polishing for Cu Damascene Interconnect	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程學系	zh_TW
Appears in Collections:	Research Plans

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