嵌入式銅導線之無研磨粒子平坦化技術的先進製程控制

標題:	嵌入式銅導線之無研磨粒子平坦化技術的先進製程控制 Advanced Process Control of Abrasive Free Polishing for Cu Damascene Interconnect
作者:	林家瑞 LIN CHIA-SHUI 國立交通大學機械工程學系
公開日期:	2003
官方說明文件#:	NSC92-2213-E009-114
URI:	http://hdl.handle.net/11536/92193 https://www.grb.gov.tw/search/planDetail?id=843533&docId=159803
Appears in Collections:	Research Plans

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