標題: Investigation on thin-film-transistors with a transparent material Zinc-Oxide layer with DC sputter deposition system
作者: Chou, Yi-Teh
Huang, Chen-Shuo
Shiau, S. J.
Liu, Po-Tsun
Chu, Li-wei
光電工程學系
Department of Photonics
公開日期: 2007
摘要: We have successfully developed a transparent thin film transistor (TTFT) with a novel material Zinc Oxide (ZnO) as semiconductor layer. The use of ZnO-based material can increases the field-effect mobility of TFT devices, the opening of AMLCD panel and releases the issue of photo-excited leakage current. In this work, the ZnO film was deposited in DC glow discharge plasma sputter system which is suitable for industrial technique and novel method in ZnO-base TFT process. With changing mixture gas flow, we can adjust the rate of Zn/ZnO mixture, Zn1+xO, and ZnO and get a suitable condition for TFT device. FTIR, XRD, SEM and AFM were utilized to analyze the characteristic of ZnO films.
URI: http://hdl.handle.net/11536/9235
ISBN: 978-957-28522-4-8
期刊: IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
起始頁: 512
結束頁: 514
Appears in Collections:Conferences Paper