新型低溫複晶矽(矽鍺)電晶體及奈米碳管場發射元件---子計畫II：低溫快速金屬誘發之結晶層製作薄膜電晶體(I)

標題:	新型低溫複晶矽(矽鍺)電晶體及奈米碳管場發射元件---子計畫II：低溫快速金屬誘發之結晶層製作薄膜電晶體(I) Integration of Thin Film Transistors on Rapid, and Low Temperature Crystallized Active Layers via Metal Inducing Mechanisms (I)
作者:	馮明憲國立交通大學材料科學工程研究所
公開日期:	2003
官方說明文件#:	NSC92-2215-E009-067
URI:	http://hdl.handle.net/11536/92561 https://www.grb.gov.tw/search/planDetail?id=873563&docId=167363
Appears in Collections:	Research Plans

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