半導體工業的廢氣及微粒之聯合去除系統

Full metadata record

DC Field	Value	Language
dc.contributor.author	蔡春進	en_US
dc.contributor.author	Chuen-Jinn Tsai	en_US
dc.date.accessioned	2014-12-13T10:34:25Z	-
dc.date.available	2014-12-13T10:34:25Z	-
dc.date.issued	2002	en_US
dc.identifier.govdoc	NSC91-2622-E009-006-CC3	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92721	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=712818&docId=133715	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	半導體工業的廢氣及微粒之聯合去除系統	zh_TW
dc.title	A Combined Waste Gas-Particle Removal System for Semiconductor Industry	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學環境工程研究所	zh_TW
Appears in Collections:	Research Plans