Spin-on ZnO thin film transistors with oxidation treatment

標題:	Spin-on ZnO thin film transistors with oxidation treatment
作者:	Huang, Chen-Shuo Chou, Yi-Teh Liu, Po-Tsun Chung, Wan-Fang Huang, Chien-Jui 光電工程學系 Department of Photonics
公開日期:	2007
摘要:	The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.
URI:	http://hdl.handle.net/11536/9312
ISBN:	978-957-28522-4-8
期刊:	IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
起始頁:	557
結束頁:	559
顯示於類別：	會議論文