集束型半導體製程設備模擬器之軟體設計製作

Full metadata record

DC Field	Value	Language
dc.contributor.author	李安謙	en_US
dc.contributor.author	LEE AN-CHEN	en_US
dc.date.accessioned	2014-12-13T10:35:19Z	-
dc.date.available	2014-12-13T10:35:19Z	-
dc.date.issued	2002	en_US
dc.identifier.govdoc	NSC91-AT-7009-002	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93336	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=790595&docId=151838	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	集束型半導體製程設備模擬器之軟體設計製作	zh_TW
dc.title	Hardware-in-the-Loop-Based Verification of Controller Software for Cluster Tool in Semiconductor Manufacture	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學機械工程系	zh_TW
Appears in Collections:	Research Plans

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