集束型化學氣相沈積製程設備模擬器及訓練器之軟體設計製作

Abstract

本論文目的，在設計一個以300mm集束型製程設備模擬器及訓練器，建構一個化學氣相沈積系統模擬器，並將模擬器與訓練器結合達到半導體設備及製程訓練功效。發展之訓練器除可提供一般市面上之訓練器之功能外(人機介面及一般操作功能)，由於結合了模擬器可任意設定各種失效模式，訓練操作人員如何處理修復模式。並將模擬器的結果導入訓練器中，讓使用者可以在使用者介面上更改各個設定來了解各設定值對生產時的影響達到熟悉整個製程及設備間的關係。

This thesis is to design a simulator incorporated with trainer of a chemical vapor deposition system for 300mm cluster tool in semiconductor manufacture. The integration of simulator and trainer has many advantages that the commercial trainers can not provide. In addition to providing the functions available in the market, i.e. Human-computer Interface and normal operation, the developed trainer accepts any receipt by the operator then shows what the process is going on in terms of animation and process data display. It also provides fault modes to be adjusted on screen so that the operators can learn how to handle recovery modes. The user can thus change all set-ups on the user interface to learn the impact of each value on the production and become more familiar with the relationship between the whole processing and equipments.