精密超薄型薄膜製程之開發

Full metadata record

DC Field	Value	Language
dc.contributor.author	黃宇中	en_US
dc.contributor.author	HUANG YU-CHUNG	en_US
dc.date.accessioned	2014-12-13T10:35:35Z	-
dc.date.available	2014-12-13T10:35:35Z	-
dc.date.issued	2001	en_US
dc.identifier.govdoc	NSC90-2218-E009-023	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93506	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=674301&docId=128528	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	薄膜製程	zh_TW
dc.subject	積體電路設計	zh_TW
dc.subject	Thin membrane process	en_US
dc.subject	Integrated circuit design	en_US
dc.title	精密超薄型薄膜製程之開發	zh_TW
dc.title	A Development of the Precise Ultra Thin Membrane Process	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程系	zh_TW
Appears in Collections:	Research Plans

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