標題: Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography
作者: Hsieh, Mei-Li
Lan, Yi-Sheng
光電工程學系
Department of Photonics
公開日期: 1-五月-2008
摘要: In this study, the micropore shape of two-dimensional (2D) photonic crystal structures can be modified and controlled by the intensity ratio of the incident beams of the holographic lithography. By adjusting the intensity ratio of the incident beams, the micropore shape of 2D hexagonal photonic crystal structure could be adjusted from being circular to being elliptical. Hence, we defined and analyzed the ellipticity of the micropore shape on a 2D photonic crystal structure as a function of the intensity ratio of the incident beams. In addition, we set up an optical holographic system by using three incident beams with different intensities to demonstrate the influence of the intensity ratio of the incident beams on the micropore shape. The optical experimental results show that the ellipticity of the micropore shape decreased with increasing the intensity ratio of the incident beams, which is the same trend as with the theoretical analysis. (C) 2008 American Vacuum Society.
URI: http://dx.doi.org/10.1116/1.2905240
http://hdl.handle.net/11536/9402
ISSN: 1071-1023
DOI: 10.1116/1.2905240
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume: 26
Issue: 3
起始頁: 914
結束頁: 917
顯示於類別:期刊論文


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