完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | 詹世雄 | en_US |
| dc.date.accessioned | 2014-12-13T10:36:47Z | - |
| dc.date.available | 2014-12-13T10:36:47Z | - |
| dc.date.issued | 1999 | en_US |
| dc.identifier.govdoc | NSC88-2215-E317-010 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/94168 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=444393&docId=80487 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 複晶矽 | zh_TW |
| dc.subject | 薄膜電晶體 | zh_TW |
| dc.subject | 鈍化 | zh_TW |
| dc.subject | 可靠度 | zh_TW |
| dc.subject | Polysilicon | en_US |
| dc.subject | Thin film transistor | en_US |
| dc.subject | Passivation | en_US |
| dc.subject | Reliability | en_US |
| dc.title | 子計畫IV：超高真空化學氣相沈積低溫複晶矽薄膜電晶體之鈍化與可靠度的研究 | zh_TW |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學毫微米實驗室 | zh_TW |
| 顯示於類別： | 研究計畫 | |
