多層二階紅外光柵的研製

標題:	多層二階紅外光柵的研製 Design and Fabrication of Multilayer-Binary Gratings for Infrared Applications
作者:	蘇德欽 SU DER-CHIN 交通大學光電工程研究所
關鍵字:	嚴格耦合波理論;光學微影術;多階式光柵;模態理論;薄膜沈積;電漿蝕刻;Rigorous coupled-wave theory;Optical lithography;Multilevel grating;Modal theory;Thin film deposition;Plasma etching
公開日期:	1999
官方說明文件#:	NSC88-2215-E009-013
URI:	http://hdl.handle.net/11536/94278 https://www.grb.gov.tw/search/planDetail?id=418392&docId=74234
Appears in Collections:	Research Plans