壓電薄膜式微致動元件材料與製程研究(II)

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳三元	en_US
dc.contributor.author	CHEN SAN-YUAN	en_US
dc.date.accessioned	2014-12-13T10:37:05Z	-
dc.date.available	2014-12-13T10:37:05Z	-
dc.date.issued	1999	en_US
dc.identifier.govdoc	NSC88-2218-E009-011	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/94369	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=443882&docId=80367	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	溼式化學沈積法	zh_TW
dc.subject	多層式電極	zh_TW
dc.subject	壓電薄膜	zh_TW
dc.subject	致動元件	zh_TW
dc.subject	接合	zh_TW
dc.subject	鈦鋯酸鉛	zh_TW
dc.subject	Wet-chemical deposition	en_US
dc.subject	Multilayer electrode	en_US
dc.subject	Piezoelectric thin film	en_US
dc.subject	Actuator	en_US
dc.subject	Bonding	en_US
dc.subject	Lead zirconate titanate (PZT)	en_US
dc.title	壓電薄膜式微致動元件材料與製程研究(II)	zh_TW
dc.title	Processing of Microactuator Decice Using Piezoelectric Thin Films (II)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學材料科學與工程研究所	zh_TW
Appears in Collections:	Research Plans