平面精密定位系統研製

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DC Field	Value	Language
dc.contributor.author	成維華	en_US
dc.contributor.author	WEI-HUACHIENG	en_US
dc.date.accessioned	2014-12-13T10:37:35Z	-
dc.date.available	2014-12-13T10:37:35Z	-
dc.date.issued	1998	en_US
dc.identifier.govdoc	NSC87-2212-E009-016	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/94741	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=364706&docId=65571	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	精密定位	zh_TW
dc.subject	衝量致動機構	zh_TW
dc.subject	次微米製程技術	zh_TW
dc.subject	光學編碼器	zh_TW
dc.subject	適應控制	zh_TW
dc.subject	Precision positioning	en_US
dc.subject	Impact drive mechanism	en_US
dc.subject	Submicro process	en_US
dc.subject	Optical encoder	en_US
dc.subject	Adaptive control	en_US
dc.subject	Degree of freedom	en_US
dc.title	平面精密定位系統研製	zh_TW
dc.title	Study and Implement of Planar Precision Positioning System	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學機械工程研究所	zh_TW
Appears in Collections:	Research Plans

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