平面精密定位系統研製

標題:	平面精密定位系統研製 Study and Implement of Planar Precision Positioning System
作者:	成維華 WEI-HUACHIENG 交通大學機械工程研究所
關鍵字:	精密定位;衝量致動機構;次微米製程技術;光學編碼器;適應控制;Precision positioning;Impact drive mechanism;Submicro process;Optical encoder;Adaptive control;Degree of freedom
公開日期:	1998
官方說明文件#:	NSC87-2212-E009-016
URI:	http://hdl.handle.net/11536/94741 https://www.grb.gov.tw/search/planDetail?id=364706&docId=65571
Appears in Collections:	Research Plans

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