Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 葉清發 | en_US |
| dc.date.accessioned | 2014-12-13T10:38:07Z | - |
| dc.date.available | 2014-12-13T10:38:07Z | - |
| dc.date.issued | 1998 | en_US |
| dc.identifier.govdoc | NSC87-2215-E009-048 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/95072 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=409164&docId=72450 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 複晶矽 | zh_TW |
| dc.subject | 液相沈積 | zh_TW |
| dc.subject | 離子披覆 | zh_TW |
| dc.subject | 保護層 | zh_TW |
| dc.subject | 薄膜電晶體 | zh_TW |
| dc.subject | Polysilicon | en_US |
| dc.subject | Liquid-phase deposition | en_US |
| dc.subject | Ion plating | en_US |
| dc.subject | Passivation layer | en_US |
| dc.subject | Thin film transistor | en_US |
| dc.title | 複晶矽薄膜電晶體相關技術之開發---子計畫二：高品質複晶矽薄膜電晶體介電絕緣層之研究(III) | zh_TW |
| dc.title | Study of High-Quality Dielectrics of Polysilicon Thin Film Transistors (III) | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 交通大學電子工程系 | zh_TW |
| Appears in Collections: | Research Plans | |
