標題: Design and fabrication of MEMS logic gates
作者: Tsai, Chun-Yin
Kuo, Wei-Ting
Lin, Chi-Bao
Chen, Tsung-Lin
機械工程學系
Department of Mechanical Engineering
公開日期: 1-四月-2008
摘要: This paper presents a novel design of MEMS logic gate that can perform Boolean algebra the same as logic devices that are composed of solid-state transistors. This MEMS logic gate design inherits all the advantages from MEMS switches and thus is expected to have more applications than MEMS switches. One unique feature of this device is that it can perform either NAND gate or NOR gate functions with the same mechanical structure but with different electrical interconnects. In a prototype design, the device is 250 mu m long, 100 mu m wide and has 1 mu m gap. The experimental results show that this device can operate at 10/0 V and achieve the proposed logic functions. The resonant frequency of the device is measured roughly at 30 kHz. Due to no metal-to-metal contact in the current device, the logic functions of the design are verified through observations and video taping.
URI: http://dx.doi.org/10.1088/0960-1317/18/4/045001
http://hdl.handle.net/11536/9517
ISSN: 0960-1317
DOI: 10.1088/0960-1317/18/4/045001
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 18
Issue: 4
結束頁: 
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