半導體批次製程可變量測延遲控制器開發研究

Full metadata record

DC Field	Value	Language
dc.contributor.author	李安謙	en_US
dc.contributor.author	LEE AN-CHEN	en_US
dc.date.accessioned	2014-12-13T10:38:21Z	-
dc.date.available	2014-12-13T10:38:21Z	-
dc.date.issued	2013	en_US
dc.identifier.govdoc	NSC102-2221-E009-052-MY2	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/95269	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=3103414&docId=419926	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	半導體批次製程可變量測延遲控制器開發研究	zh_TW
dc.title	The Development of Semiconductor Run-To-Run Process Controller with Variable Measurement Delay	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程學系（所）	zh_TW
Appears in Collections:	Research Plans