Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 蘇翔 | en_US |
| dc.date.accessioned | 2014-12-13T10:39:03Z | - |
| dc.date.available | 2014-12-13T10:39:03Z | - |
| dc.date.issued | 1996 | en_US |
| dc.identifier.govdoc | NSC85-2745-P009-001 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/96028 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=223377&docId=40053 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 同步輻射X光光刻術發展之可行性評估---子計畫二：同步輻射X光光罩製作 | zh_TW |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| Appears in Collections: | Research Plans | |
