| 標題: | 熱導型高氣壓微感測元件之研究 Study on High Pressure Microsensor of Thermal Conductivity Type |
| 作者: | 謝正雄 國立交通大學光電工程研究所 |
| 關鍵字: | 微感測器;微加工技術;氣體壓力感測;熱導率;Microsensor;Micromachining;Gas pressure sensing;Thermal conductivity |
| 公開日期: | 1996 |
| 官方說明文件#: | NSC85-2215-E009-040 |
| URI: | http://hdl.handle.net/11536/96031 https://www.grb.gov.tw/search/planDetail?id=234551&docId=43050 |
| 顯示於類別： | 研究計畫 |
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- An innovative Pirani pressure sensor / Chou, BCS;Shie, JS
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- 熱型微感測元件之熱參數測量 / 黃上達;Thunter Hwang;謝正雄;Jin-Shown Shie
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