以雷射退火製備高性能奈米碳管薄膜感測與場發射元件於可撓式基板之元件技術開發與研究

Abstract

隨著數位化時代來臨，未來電子產品除走向輕薄短小外，也將走向如電子紙等可撓式顯示器產品應用；其中場發射顯示器擁有自主發光特性、高對比以及低能耗等優點；另一方面，醫療電子之需求及重要性也越來越高，故簡易但精準的生醫感測元件為未來發展目標。由於奈米碳管具良好導電性、高應力性及抗酸鹼能力，故在生醫感測與場發射元件應用上有極大潛力。因此，在本計畫中我們利用熱化學氣相沉積法成長高長度與結晶性佳的奈米碳管，將其刮除後製備均勻之奈米碳管溶液，同時發展碳管溶液噴塗或旋塗技術在特定基板上製作碳管薄膜。接著利用準分子雷射或連續波雷射照射碳管薄膜以得到電性與光學特性均獲得改善之高性能碳管薄膜，並搭配不同硬質基板之選擇，將雷射退火效果最佳化，並在硬質基板上進行場發射元件與酸鹼感測元件之應用技術開發。最後將該技術應用至軟性基板上，利用碳管薄膜轉移技術或直接沉積碳管薄膜於軟性基板上，透過雷射退火改善整體薄膜特性，進而實現將酸鹼感測與場發射元件製作在可撓式基板上之目標。本研究計畫將以雷射退火提升奈米碳管薄膜的特性，利用高導電率之奈米碳管薄膜製作可撓式場發射元件及生醫感測元件為目標，將大幅提升碳管薄膜應用的可能，並促進國內相關技術之發展與國際能見度。

As the digital age coming, electronic products in the future are going to be not only short-thin, but also flexible such as electronic papers. In particular, the field emission displays have the advantages such as self-emissive characteristics, high contrast ratio and low power consumption. Also, since the requirement and importance of medical electronics become higher recently, the simple and precise biosensor devices will be the development goal. Because of good conductivity, strong mechanical strength, high aspect ratio, extreme surface to volume ratio, and excellent chemical tolerance, CNTs have great potential for the applications in biosensor and field emission devices. Therefore, with high transparency and conductivity, the flexible devices made by CNTs thin films are proposed in this study. The uniformly dispersed CNT solution is prepared at first, followed by the CNTs deposition techniques, spray and spin-coating, are developed to various substrates. Afterwards, the as-prepared CNTs thin film is irradiated by either excimer laser or continuous wave laser in order to obtain the high performance thin film with both electrical and optical characteristic improvement. In addition, based on different physical properties of substrates, the effects of laser annealing are optimized for the fabrications of field emission devices and the pH sensors. Finally, CNTs thin film fabricated on flexible substrates via transfer process or directly-deposited technique is developed, then improving the overall characteristics of the CNTs thin film by laser annealing, and further achieving the flexible pH sensors and field emission devices fabrication. This project mainly aims at fabricating CNTs thin film flexible devices of both field emission and biosensor with high conductivity, high transparency and good uniformity, facilitating the developments of the related techniques.