精巧型全像蝕刻系統之設計與建立以及探討光子晶體於發光二極體之特性研究(II)

Abstract

本研究計畫主要在設計並建構精巧的全像微影蝕刻系統，利用全像干涉術來製作二維光子晶體結構，且應用於發光二極體元件上，探討二維光子晶體結構對發光二極體之輸出光的各項特性之影響，以期提升未來發光二極體的應用價值。其研究工作項目分兩年進行，此計畫為第二年，將藉由第一年所設計之全像干涉系統以及所研製之全像分光元件，結合市售的菱鏡來建構一多道光束干涉系統，以建立可製作大面積週期性光子晶體結構之光學干涉系統，同時根據光學干涉系統的各項參數，以及發光二極體的發光特性，先從理論設計發光二極體上之二維光子晶體週期結構，再利用全像蝕刻技術製作出此二維光子晶體結構於發光二極體上，以達到大面積製程的目的，並以光學系統量測其輸出光特性。

The advantage of the holographic lithography is that it can be easy and quick to generate the periodic intensity distribution on the photosensitive materials as the photonic crystal structure. The main goal of this proposal is to design and build-up a compact holographic optical system for fabricating the photonic crystal structure on light emitted diode (LED). In addition, the optical characteristics of output from LED will be studied both in theoretical and experimental. This research is divided into two phases. In last year, we had design and fabricated the holographic beam splitter. Then, we will setup a compact holographic system with multiple beams by using the commercial prisms and optical devices. The parameters for fabricating the photonic crystal structure with this holographic system will be examined and the optimum condition of the compact holographic system will be achieved according to the experimental results. In addition, we will analyze theoretically the optical properties of the LED with/without photonic crystal structure and fabricate the photonic crystal structure by using the compact holographic system which is build up in the first year. In summary, this research will perform an intensive study on optical design, analysis, and metrology on the holographic lithography for the LED application with two-dimensional photonic crystals.