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藉由流體雷諾數原理操控之致動器及其製造方法與操作方法

dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber200524818zh_TW
dc.contributor.author徐琅en_US
dc.contributor.author劉承賢en_US
dc.contributor.author張晃猷en_US
dc.contributor.author彭慧玲en_US
dc.contributor.author張傑en_US
dc.date.accessioned2014-12-16T06:13:38Z
dc.date.available2014-12-16T06:13:38Z
dc.date.issued2005-08-01en_US
dc.description.abstract一種藉由流體雷諾數原理操控之致動器,其包括數條固定電極,配置在一基板上;一絕緣層,形成於基板上且覆蓋住上述之固定電極;以及數條可動電極,對應配置於上述固定電極上方之絕緣層上,其中上述之可動電極的一端係固定於絕緣層上,而另一端則遠離絕緣層,以使可動電極向上翹曲。zh_TW
dc.identifier.govdocB81B003/00zh_TW
dc.identifier.govdocB81C005/00zh_TW
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/104243
dc.language.isozh_TWen_US
dc.title藉由流體雷諾數原理操控之致動器及其製造方法與操作方法zh_TW
dc.typePatentsen_US

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