Improvement of the performance of TiHfO MIM capacitors by using a dual plasma treatment of the lower electrode
| dc.citation.epage | 1107 | en_US |
| dc.citation.issue | 10 | en_US |
| dc.citation.spage | 1105 | en_US |
| dc.citation.volume | 29 | en_US |
| dc.citation.woscount | 17 | |
| dc.contributor.author | Cheng, C. H. | en_US |
| dc.contributor.author | Pan, H. C. | en_US |
| dc.contributor.author | Huang, C. C. | en_US |
| dc.contributor.author | Chou, C. P. | en_US |
| dc.contributor.author | Hsiao, C. N. | en_US |
| dc.contributor.author | Hu, J. | en_US |
| dc.contributor.author | Hwang, M. | en_US |
| dc.contributor.author | Arikado, T. | en_US |
| dc.contributor.author | McAlister, S. P. | en_US |
| dc.contributor.author | Chin, Albert | en_US |
| dc.contributor.department | 機械工程學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Mechanical Engineering | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:10:51Z | |
| dc.date.available | 2014-12-08T15:10:51Z | |
| dc.date.issued | 2008-10-01 | en_US |
| dc.description.abstract | We show that a conventional nitrogen plasma treatment is insufficient to suppress the formation of an interfacial layer at the bottom electrode of TiHfO metal-insulator-metal (MIM) capacitors. However, the capacitance density and leakage current of TaN/TiHfO/TaN MIM capacitors monotonically improve by exposing the lower TaN electrode to an additional oxygen plasma treatment. By performing dual oxygen and nitrogen plasma treatments on the lower electrode, the leakage current was 4.8 x 10(-6) A/cm(2) (at -1 V) at a 28 fF/mu m(2) capacitance density. | en_US |
| dc.identifier.doi | 10.1109/LED.2008.2000945 | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/LED.2008.2000945 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/8303 | |
| dc.identifier.wosnumber | WOS:000259812900007 | |
| dc.language.iso | en_US | en_US |
| dc.subject | high kappa | en_US |
| dc.subject | metal-insulator-metal (MIM) | en_US |
| dc.subject | plasma treatment | en_US |
| dc.subject | TiHfO | en_US |
| dc.title | Improvement of the performance of TiHfO MIM capacitors by using a dual plasma treatment of the lower electrode | en_US |
| dc.type | Article | en_US |