The ellipsometric measurements of a curved surface
| dc.citation.epage | L1018 | en_US |
| dc.citation.issue | 28-32 | en_US |
| dc.citation.spage | L1015 | en_US |
| dc.citation.volume | 44 | en_US |
| dc.citation.woscount | 5 | |
| dc.contributor.author | Lee, KY | en_US |
| dc.contributor.author | Chao, YF | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:37:07Z | |
| dc.date.available | 2014-12-08T15:37:07Z | |
| dc.date.issued | 2005 | en_US |
| dc.description.abstract | A three-intensity imaging ellipsometric technique is proposed to investigate the surface topography as well as the refractive index profile (RIP) of a lens. The azimuth deviation of polarizer caused by the tilting of a SiO2 thin film on Si substrate was investigated after a careful calibration on the azimuth position of polarizer of the water-surface. The azimuth deviation of polarizer is proved to be the local surface normal; thus we can determine not only the radius of curvature of a Plano-Convex lens from the measurement, but also its incident-angle-corrected RIP. | en_US |
| dc.identifier.doi | 10.1143/JJAP.44.L1015 | en_US |
| dc.identifier.issn | 0021-4922 | en_US |
| dc.identifier.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1143/JJAP.44.L1015 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/25488 | |
| dc.identifier.wosnumber | WOS:000231426100041 | |
| dc.language.iso | en_US | en_US |
| dc.subject | topography | en_US |
| dc.subject | imaging ellipsometry | en_US |
| dc.subject | refractive index profile | en_US |
| dc.title | The ellipsometric measurements of a curved surface | en_US |
| dc.type | Article | en_US |